| Issue |
J. Phys. IV France
Volume 03, Number C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | C3-25 - C3-33 | |
| DOI | https://doi.org/10.1051/jp4:1993303 | |
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
J. Phys. IV France 03 (1993) C3-25-C3-33
DOI: 10.1051/jp4:1993303
1 Dept. of Chemistry, Moscow State University, B-234,119899 Moscow, Russia
2 Institut für Oberflächentechnik, Technische Universität Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany
© EDP Sciences 1993
J. Phys. IV France 03 (1993) C3-25-C3-33
DOI: 10.1051/jp4:1993303
Investigation of the kinetics of MOCVD with a stagnation cell
O. YU GORBENKO1, W. DECKER2 and G. WAHL21 Dept. of Chemistry, Moscow State University, B-234,119899 Moscow, Russia
2 Institut für Oberflächentechnik, Technische Universität Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany
Abstract
Solutions of the mass transfer equation in the stagnation cell are described. It is shown that the application of the stagnation cell can be used for the determination of Das, distinguishing different types of process control, sensoring gas phase condensation and homogeneous nucleation. The results obtained with cylindrical cell for MOCVD of YBCO are discussed.
© EDP Sciences 1993