| Numéro |
J. Phys. IV France
Volume 09, Numéro PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | Pr8-411 - Pr8-418 | |
| DOI | https://doi.org/10.1051/jp4:1999851 | |
J. Phys. IV France 09 (1999) Pr8-411-Pr8-418
DOI: 10.1051/jp4:1999851
Injection MOCVD of BaTiO3/SrTiO3 artificial superlattices
J. Lindner1, F. Weiss1, J.-P. Sénateur1, W. Haessler2, G. Koebernik2, A. Figueras3 and J. Santiso31 LMGP, INPG Grenoble, BP. 46, 38402 Saint-Martin-d'Hères, France
2 IFW, Helmholtzstrasse, 01714 Dresden, Germany
3 ICMAB, Campus UAB, 08193 Bellaterra, Spain
Abstract
In this paper we report on the deposition of BST films and BaTiO3/SrTiO3 superlattices (BTO/STO) obtained by injection MOCVD. In a first time, BST films were deposited on various substrates such as LaAlO3(LAO), SrTiO3:Nb(STO:Nb) and Al2O3(0001), resulting in epitaxial films in the case of STO or LAO substrates and highly textured films in the case of Al2O3 substrates. The good crystallinity of the films obtained was evidenced using X-ray analysis. Concerning the dielectric properties of the BST films deposited on STO:Nb one can mention that the Tc values were found to be the same as those for bulk materials. Furthermore, the feasibility of BTO/STO multilayers on Al2O3 (0001) was investigated. The grown superlattices were (111) oriented, displaying good crystallinity.
© EDP Sciences 1999