J. Phys. IV France 03 (1993) C8-467-C8-470
Local thickness measurements using reflectivity of X-rays in the dispersive angle modeJ. CHIHAB1, J. ALLAIN2 and A. NAUDON2
1 Ecole Nationale d'Ingénieurs de Tarbes (ENIT), Chemin d'Azereix, BP. 1629, 65016 Tarbes cedex, France
2 Laboratoire de Métallurgie Physique, 40 avenue du Recteur Pineau, 86022 Poitiers cedex, France
The multiple beam interference of parallel layers and/or the Bragg peaks of multilayers are measured in the angle-resolved dispersive mode with a position sensitive proportional counter. The specimen is illuminated by a divergent X-ray beam produced by a sealed linear focus tube. The arrangement permits either to obtain spectra in a short time and to eliminate any movement during measurement. Furthermore, this configuration has the advantage of analysing a small surface area of the specimen (less than 1 mm2). Consequently, a scanning of a layer or a multilayer is possible. Both examples concerning a deposited layer and a multilayer will be given, showing variation in thickness according to the distance between the sputtering or evaporation system and the sample holder.
© EDP Sciences 1993