Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-579-C3-587
DOI: 10.1051/jp4:1993380

Ion-assisted CVD of graded diamond like carbon (DLC) based coatings

D.P. MONAGHAN¹, D.G. TEER², R.D. ARNELL³, I. EFEOGLU³ and W. AHMED<sup>4

1</sup>  Teer Coatings Ltd (Northern), Technology House, Lissadel St, Salford M6 6AP, United Kingdom
²  Teer Coatings Ltd, 285/286 Hartlebury Trading Estate, Kidderminster, Worcester DY10 4JB, United Kingdom
³  Department of Aeronautical and Mechanical Engineering, University of Salford, Salford M5 4WT, United Kingdom
⁴  Surface Engineering, SUBSL, Technology House, Salford M6 6AP, United Kingdom

Abstract
Graded DLC based coatings and multilayers for wear resistance applications have been produced using a novel hybrid unbalanced magnetron sputtering/ low pressure CVD System. The main features of this highly flexible and scalable process are discussed. These films have been characterised using a variety of techniques including SEM, microhardness, adhesion, wear rate and lifetime tests. For example : microhardness of > 4000 Hv ; excellent adhesion, Lc 115-125 N ; coefficient of friction during prolonged mnning against WC of 0.15 ; volumetric wear rates 1/5 of that of TiN. The process is ideally suited to large substrate size and volume production for many different kinds of applications.

© EDP Sciences 1993