| Numéro |
J. Phys. IV France
Volume 104, March 2003
|
|
|---|---|---|
| Page(s) | 591 - 594 | |
| DOI | https://doi.org/10.1051/jp4:20030151 | |
J. Phys. IV France 104 (2003) 591
DOI: 10.1051/jp4:20030151
Phase-contrast hard X-ray microscope with a zone plate at the photon factory
H. Yokosuka1, N. Watanabe1, T. Ohigashi1, S. Aoki1 and M. Ando21 Institute ofApplied Physics, University of Tsukuba, Tennoudai 1-1-1, Tsukuba, Ibaraki, Japan
2 Institute of Material Structure Science, KEK, Oho 1-1, Tsukuba, Ibaraki, Japan
Abstract
A Zernike-type phase-contrast X-ray microscope with a zone plate and a phase plate has been developed at the Photon Factory
BL3C2. The zone plate had the outermost zone width of 0.1
m and the diameter of t55
m. Parallel monochromatic X-rays of 9 keV were incident on a specimen and a direct beam transmitted through the specimen was
focused on the back focal plane of the zone plate where a phase plate was placed. Two types of phase plates were tested. One
was an aluminum foil with a pinhole, and the other was a gold wire embeded in epoxy resin. Using the aluminum phase plate,
a tantalum line pattern as fine as 0.2
m could be imaged. Almost transparent specimens, such as polystyrene beads of 2.8
m in diameter could be also observed. Using the gold
phase plate, a tantalum line pattern as fine as 0.1
m could be imaged.
© EDP Sciences 2003