J. Phys. IV France 104 (2003) 255
High reflective Co xCr 1-x/C multilayer mirror for using X-ray photoemission spectroscopy in the wavelength region around 6 nmH. Takenaka1, K. Nagai1, H. Ito1, S. Ichimaru1, T. Ohchi1, Y. Muramatsu2 and E.M. Gullikson3
1 NTT Advanced Technology Co., 162 Shirakata, Tokai, Ibaraki 319-1193, Japan
2 Japan Atomic Energy Research Institute, Kouto, Sayo-gun, Hyogo 679-5148, Japan
3 Lawrence Berkeley National Laboratory, Berkeley, M 94720, U.S.A.
The development of highly reflective multilayer mirrors for use in the wavelength region around 6-nm is desired for X-ray photoemission spectroscopy for inner-shell excitation using a Schwarzschild objective. For this application, reflectivity is the most critical parameter determining the performance of multilayer mirrors, because the reflectivity of multilayers in the 6-nm region is generally very low. We have fabricated the Co/C and Cr/C multilayer mirrors by magnetron sputtering. The measured peak reflectivity of the Cr/C multilayer is about 18.9% at the wavelength of 6.42 nm and the incident angle of 88° and the reflectivity of the Co/C multilayer is 10.1% at the wavelength of 6.06 nm and the incident angle of 88°. The reflectivities of the Cr/C and Co 0.8Cr 0.2/C multilayers are enough high. Therefore, we found that Cr/C or Co Cr /C multilayer is sufficiently used for Schwarzschild mirror for X-ray photoemission spectroscopy at 6 nm X-ray.
© EDP Sciences 2003