J. Phys. IV France
Volume 104, March 2003
Page(s) 235 - 238

J. Phys. IV France
104 (2003) 235
DOI: 10.1051/jp4:200300069

High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8

A. Takeuchi, Y. Suzuk and H. Takano

JASRI/SPring-8, Kouto 1-1-1, Mikazuki, Sayo, Hyogo 679-5198, Japan

X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75  $\mu$m and 0.32  $\mu$m, respectively. The photon flux of the focal spot was $2 \times 10^{10}$ [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2  $\mu$m line width was clearly observed with raster scan.

© EDP Sciences 2003