J. Phys. IV France 104 (2003) 141
Development of soft X-ray microscopy System using X-ray laser in JAERI KansaiM. Kishimoto1, M. Tanaka1, R. Tai1, K. Sukegawa1, M. Kado1, N. Hasegawa1, H. Tang1, T. Kawachi1, P. Lu1, K. Nagashima1, H. Daido1, Y. Kato1, K. Nagai2 and H. Takenaka2
1 Kansai Research Establishment, Japan Atomic Energy Research Institute, 8-1 Umemidai, Kizu-cho, Souraku-gun, Kyoto 619-0215, Japan
2 NTT Advanced Technology Corporation, 162 Shirakata, Tokai, Naka, Ibaraki 319-1193, Japan
A picosecond time-resolved soft X-ray microscopy System using an X-ray laser has been developed. A 13.9 nm coherent X-ray laser is generated by means of a ps CPA glass laser System. The pulse duration and the number of photons of the X-ray laser are about 7 ps and 10 12 photons/pulse, respectively. The X-ray laser pulse is condensed with a Schwarzschild optics and illuminated onto the sample. The transmitted X-ray image is magnified with a zone plate. X-ray images of a Cu mesh and a zone plate with spatial resolution of about 200 nm has been obtained by a single shot of ps X-ray laser.
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