J. Phys. IV France
Volume 104, March 2003
Page(s) 49 - 52

J. Phys. IV France
104 (2003) 49
DOI: 10.1051/jp4:200300027

Hard X-ray phase-contrast microscope for observing transparent specimens

Y. Kagoshima1, Y. Yokoyama1, T. Niimi1, T. Koyama1, Y. Tsusaka1, J. Matsui1 and K. Takai2

1  Graduate School of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan
2  Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Mikazuki, Sayo, Hyogo 679-5198, Japan

A hard X-ray transmission imaging microscope has been in use at the beamline BL24XU of SPring-8. It makes use of a phase zone plate made of tantalum as its X-ray lens, and is capable of imaging the structure as fine as 125-nm line-and-space pattern. The Zernike's phase-contrast method has been implemented to the microscope with phase plates made of gold. The photon energy was tuned to 12 keV just above the L 3 absorption edge of gold (11.9 keV) in order to increase the image contrast. Polystyrene micro particles as transparent specimens were imaged clearly in the opposite image contrast with phase plates to shift the phase of the central order spectra in the back focal plane of the objective by one-quarter and three-quarters of a period, while the absorption contrast image showed little image contrast. Performance of the newly developed phase zone plate has been tested and it was confirmed that the structure as fine as 60-nm line-and-space pattern was able to be imaged.

© EDP Sciences 2003