J. Phys. IV France 12 (2002) Pr3-127
DOI: 10.1051/jp420020050

Cryogenic detector systems for materials analysis

J. Höhne¹, M. Bühler¹, F.V. Feilitzsch², J. Jochum², T. Hertrich¹, C. Hollerith^{3, 2}, M. Huber², J. Nicolosi⁴, K. Phelan¹, D. Redfern⁴, B. Simmnacher³, R. Weiland³ and D. Wernicke<sup>1

1</sup>  Vericold Technologies GmbH, Sendlinger Str. 22, 80331 München, Germany
²  Technische Universität München, Physik Department E15, 85747 Garching, Germany
³  Infineon Technologies AG, Failure Analysis FA5, München, Germany
⁴  EDAX Inc., 91 McKee Drive, Mahwah, NJ 07430, U.S.A.

Abstract
The need to analyze small amounts of materials on surfaces e.g. in semiconductor industry drives the development of high resolution X-ray spectrometers based on superconducting detector technology. Since low excitation energies needed for high spatial resolution in Field Emission Scanning Electron Microscopes (FESEM) yield only X-ray lines in the lower part of the X-ray spectrum (<5keV), line overlaps become a serious issue in the spectral analysis. This problem can be overcome with superconducting detector technology having better energy resolution and thus the ability to separate X-ray lines of important material combinations. For industrial applications the cooling system for the superconducting sensor plays an important role, since liquid coolants are not being tolerated in clean room environments. This work will cover the basic needs of the materials analyst as well as the practical implementation of superconducting X-ray spectrometers for industrial applications.

© EDP Sciences 2002