J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
Page(s) Pr3-621 - Pr3-628
Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-621-Pr3-628

DOI: 10.1051/jp4:2001379

Thermal conversions of some Ba, Sr, Ti oxide precursors for CVD

A.E. Turgambaeva and I.K. Igumenov

Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Lavrentiev 3, Novosibirsk 630090, Russia

Gas phase composition and conversions under evaporation and thermal decomposition of Sr(dpm)2, Ba(dpm)2, TiO(dpm)2 and Ti(OPri)2(dpm)2 (dpm=C(CH3)3COCHCOC(CH3)3, Pri = CH(CH3)2) which are conventional CVD precursors for BST films have been studied by means of original mass spectrometric technique. Properties and thermal behaviour of these compounds have been compared with respect to CVD precursor. It has been shown that conversions leading to binuclear species formation occur under transportation of TiO(dpm)2 into deposition zone. It has been reported alike decomposition mechanism of Sr and Ba precursors. Influence of oxygen on thermal stability and products of decomposition of the source compound has been shown.

© EDP Sciences 2001