J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
Page(s) Pr3-467 - Pr3-471
Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-467-Pr3-471

DOI: 10.1051/jp4:2001359

Nanocrystalline ZnO from siloxy-substituted single-source precursors

K. Merz, R. Schoenen and M. Driess

Chair of Inorganic Chemistry I, University of Bochum, 44801 Bochum, Germany

We report here the synthesis and growth of nanocyrstalline ZnO particles from solid and the CVS of nanoparticles size < 10nm from siloxy-substituted di-, tri-,tetra- and polynuclear ZnO-clusters. ZnO is of interest for a wide range of applicaticons such as electrodes for solar cells or for electroluminescence devices. The ZnO-aggregates as molecular precursors are accessible by simple reactions of ZnR'2 with the respective silanoles R3SiOH, affording the dimeric [(Me3Si)2NZnOSiR3]2, trinuclear [(MeZn)2Zn(OSiR3)4], tetranuclear heterocubanes [MeZnOSiR3]4 and the polymeric [(Me3SiO)2Zn]n respectively. Surprisingly, they are useful single-source precursors for low-temperature synthesis of ZnO particles in solid state and through chemical vapor synthesis (CVS).

© EDP Sciences 2001