J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
Page(s) Pr3-391 - Pr3-398
Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-391-Pr3-398

DOI: 10.1051/jp4:2001350

Processing of (PyC/TiC)n multilayered coatings by pulsed CVD and RCVD

O. Rapaud, H. Vincent, C. Vincent, S. Jacques and J. Bouix

Laboratoire des Multimatériaux et Interfaces, UMR 5615 du CNRS, Université Claude Bernard Lyon I, bâtiment 731, 43 boulevard du 11 novembre 1918, 69622 Villeurbanne cedex, France

Pyrocarbon/titanium carbide (PyC/TiC)n multilayered coatings have been deposited on carbon substrates by P-RCVD which is a combination of pulsed chemical vapour deposition (P-CVD) with reactive CVD (RCVD). From thermodynamic calculations, a thin TiC sublayer deposited between two PyC sublayers should be stoichiometric. TiC and PyC growth rates have been investigated, as well as PyC consumption occurring during carbide growth by P-RCVD. Hence, this process allows to achieve a sharp control of each sublayer thickness. Furthermore, it seems possible to totally consume the PyC intercalated between adjacent carbide sublayers in order to obtain a multilayered carbide (TiC)n. This method has been used to coat carbon fibres. The very first mechanical tests carried out on coated fibres are encouraging. The next step of this work lies in the study of such sub-micrometric coatings as interphases in ceramic matrix composites.

© EDP Sciences 2001