J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
Page(s) Pr3-341 - Pr3-347
Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-341-Pr3-347

DOI: 10.1051/jp4:2001343

Structural properties of [(La0.7Sr0.3MnO3/SrTiO3)]15 superlattices prepared by pulsed injection-MOCVD

M. Rosina1, 2, C. Dubourdieu1, F. Weiss1, J.P. Sénateur1 and K. Fröhlich2

1  LMGP, UMR 5628 du CNRS, ENSPG, BP. 46, 38402 Saint-Martin-d'Hères, France
2  Institute of Electrical Engineering, SAS, Dúbravská cesta 9, 84239 Bratislava, Slovakia

[La0.7Sr0.3MnO3/SrTiO3]15 superlattices (LSMO/STO) with different thickness of STO or LSMO layers were grown on the (001) surface of single crystal substrates (LaAlO3, SrTiO3 and MgO) by pulsed liquid-injection MOCVD. Structural properties of the deposited superlattices were investigated by X-ray diffraction analysis. Θ/Θ2 scans indicated that LSMO and STO layers are highly (001) oriented and showed the satellite peaks characteristic of a superlattice structure. It was observed that the strain state in the superlattices depends on the relative thickness of the LSMO and STO layers and on the substrate nature.

© EDP Sciences 2001