J. Phys. IV France 11 (2001) Pr2-389-Pr2-396
Liquid-jet laser-plasma X-ray sources for microscopy and lithographyH.M. Hertz, M. Berglund, B.A.M. Hansson, O. Hemberg and G.J. Johansson
Biomedical and X-Ray Physics, Royal Institute of Technology, 10044 Stockholm, Sweden
We review the development of compact laser-plasma soft x-ray sources based on microscopic liquid-drop or liquid-jet targets. It is shown that such sources provide practically debris-free, high-flux operation at water-window and EUV wavelengths. This regenerative and solid-density target system holds promise for the generation of high-average power using high-repetition-rate lasers. Application of the source to compact x-ray microscopy, multilayer-optics characterization and EUV lithography is briefly discussed.
© EDP Sciences 2001