| Numéro |
J. Phys. IV France
Volume 11, Numéro PR2, Juillet 2001
X-Ray Lasers 2000
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|---|---|---|
| Page(s) | Pr2-389 - Pr2-396 | |
| DOI | https://doi.org/10.1051/jp4:2001275 | |
7th International Conference on X-Ray Lasers
J. Phys. IV France 11 (2001) Pr2-389-Pr2-396
DOI: 10.1051/jp4:2001275
Biomedical and X-Ray Physics, Royal Institute of Technology, 10044 Stockholm, Sweden
© EDP Sciences 2001
J. Phys. IV France 11 (2001) Pr2-389-Pr2-396
DOI: 10.1051/jp4:2001275
Liquid-jet laser-plasma X-ray sources for microscopy and lithography
H.M. Hertz, M. Berglund, B.A.M. Hansson, O. Hemberg and G.J. JohanssonBiomedical and X-Ray Physics, Royal Institute of Technology, 10044 Stockholm, Sweden
Abstract
We review the development of compact laser-plasma soft x-ray sources based on microscopic liquid-drop or liquid-jet targets. It is shown that such sources provide practically debris-free, high-flux operation at water-window and EUV wavelengths. This regenerative and solid-density target system holds promise for the generation of high-average power using high-repetition-rate lasers. Application of the source to compact x-ray microscopy, multilayer-optics characterization and EUV lithography is briefly discussed.
© EDP Sciences 2001