International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
J. Phys. IV France 11 (2001) Pr11-115-Pr11-119
DOI: 10.1051/jp4:20011118
Preparation and characterization of Au/ZrO2 composite obtained by oxidation of thin film ZrxAuy alloy
N. Sanz, M. Lomello-Tafin and Ph. GalezLAIMAN, ESIA, Université de Savoie, BP. 806, 74016 Annecy, France
Abstract
We present the preliminary results of a study aiming at preparing Au/ZrO2 mixed nanosized particles from thin films. In a first step, pure Zr and Au layers are alternatively deposited by RF sputtering on Si and W substrates under vacuum. Then, the intermetallic compounds are formed at high temperature under an inert atmosphere or in vacuum. The resulting samples are characterized by X-ray diffraction and by scanning electron microscopy.
Keywords : Intermetallic compounds, Gold nanoparticles, Thin films, Gas sensors
© EDP Sciences 2001