Journal de Physique IV

CONTROL OF GERMANIUM ATOMIC LAYER FORMATION ON SILICON USING FLASH HEATING IN GERMANIUM CVD

J. MUROTA, M. SAKURABA, N. MIKOSHIBA and S. ONO

J. Phys. IV France, 02 C2 (1991) C2-803-C2-808

DOI: 10.1051/jp4:1991294

J. MUROTA

M. SAKURABA

N. MIKOSHIBA

S. ONO

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