J. Phys. IV France 02 (1991) C2-803-C2-808
CONTROL OF GERMANIUM ATOMIC LAYER FORMATION ON SILICON USING FLASH HEATING IN GERMANIUM CVDJ. MUROTA1, M. SAKURABA1, N. MIKOSHIBA2 and S. ONO1
1 Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980, Japan
2 Hewlett-Packard Laboratories Japan, 100-3 Sakado, Takatsu-ku, Kawasaki 213, Japan
The separation between surface adsorption and reaction of GeH4 on a Si substrate was investigated by heating the surface with a Xe flash lamp in an ultraclean low-pressure environment. The GeH4 partial pressure dependence of the deposited Ge thickness and relationship between atomic layer thickness and the shot to shot time interval have been investigated. Single atomic layer deposition per flash lamp light shot has been realized for some process conditions. From electron diffraction patterns, a single-crystallinity was found for most substrate orientations.
© EDP Sciences 1991