J. Phys. IV France
Volume 137, November 2006
Page(s) 95 - 98
Publié en ligne 23 décembre 2006
35th Winter School on Wave and Quantum Acoustics
J. Bodzenta, M. Dzida and T. Pustelny
J. Phys. IV France 137 (2006) 95-98

DOI: 10.1051/jp4:2006137018

Investigations of bilayer sensor structure with copper phthalocyanine and palladium for hydrogen detection in SAW system

W.P. Jakubik

Institute of Physics, Silesian University of Technology, 44-100 Gliwice, Poland

(Published online 23 December 2006)

Bilayer structure with copper phthalocyanine (CuPc~100 nm) and palladium (~18 nm), has been studied for hydrogen gas-sensing application at $\sim\!30^{\circ}$C and $\sim\!50^{\circ}$C temperatures. The structure was fabricated in a two different vacuum deposition processes (first the CuPc film and than the Pd) onto a LiNbO3 Y- cut Z-propagating substrate for a SAW method and additionally (in this same technological processes) onto a glass substrate with a planar microelectrode array for simultaneously monitoring of the structure planar resistance. A good correlation has been observed between this two methods - frequency changes for SAW method coincide with decreasing of the bilayer structure resistance. Although the simultaneously measurements not always were possible (too big resistance of the sample) they can give informations about the acoustoelectric interactions between SAW and charge carriers in the bi-layer structure.

© EDP Sciences 2006