Numéro |
J. Phys. IV France
Volume 112, October 2003
|
|
---|---|---|
Page(s) | 845 - 848 | |
DOI | https://doi.org/10.1051/jp4:20031013 |
J. Phys. IV France 112 (2003) 845
DOI: 10.1051/jp4:20031013
Effect of magnetic field configuration on the properties of thin films sputter deposited from a dc magnetron TiNi target
V. Martynov, A.D. Johnson and V. GuptaTiNi Alloy Company, 1619 Neptune Drive, San Leandro, CA 94577, U.S.A.
Abstract
A direct current magnetron target assembly with rotating adjustable magnets arrangement has been used for thin film sputter
deposition from a 200 mm diameter TiNi target in a PE 4450 sputtering system. It was found that for a simple circular magnet
arrangement placed 20 mm off the rotation axis the films deposited on the stationary pallet have significant variation in M
temperatures as measured from the center of the magnetron. This variation across the 100 mm wafer is as large as ~100
C. The gradient in M
for the sputtered film can be significantly lowered by using an appropriate configuration of magnets, which in combination
with rotation of the pallet, results in narrowing the difference in M
to less than 10
C. Further adjustment of transformation temperatures of the film can be accomplished by simultaneous sputtering on the rotating
pallet from two targets. Depending on which direction the transformation intervals need to be moved, the second target should
be either Ti or Ni. The deposition rates for the TiNi and Ni targets were calibrated and calibration results were applied
for calculating the power settings to sputter film with A
C. The transformation intervals and stress-strain curves across a 100 mm wide area were measured for this film.
© EDP Sciences 2003