Numéro |
J. Phys. IV France
Volume 104, March 2003
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Page(s) | 627 - 630 | |
DOI | https://doi.org/10.1051/jp4:20030158 |
J. Phys. IV France 104 (2003) 627
DOI: 10.1051/jp4:20030158
X-ray fluorescence tomography for non-destructive semi-quantitative study of microobjects
M. Chukalina1, A. Simionovici2, 3, L. Lemelle3, C. Rau1, L. Vincze4 and Ph. Gillet31 Institute of Microelectronics Technology RAS, 142432 Chemogolovka, Russia
2 European Synchrotron Radiation Facility, BP. 220, 38043 Grenoble cedex, France
3 Laboratoire des Sciences de la Terre, ENS Lyon, 69346 Lyon, France
4 MiTAC, University of Antwerp (UIA), Universiteitsplein 1, 2610 Antwerp, Belgium
Abstract
The goal of this work is to present the current state of the X-ray Fluorescence Computed
Microtomography. The advantages of both the experimental techniques and the data processing
(the ESRF ID22 beamline facilities [1]) arc considered. The latter one includes the spectra
treatment, reconstruction of the atomic density distribution function of the element under
consideration and/or calculation of the element effective concentration map and calculation
of the element ratio maps. Possible ways of estimating the space resolution and the accuracy are
discussed. Results of the tomographic investigation of the NWA817 meteorite micro-grain are
presented.
© EDP Sciences 2003