Zernike phase-contrast X-ray microscope with an X-ray refractive lens

Abstract
Zemike phase-contrast microscopy was realized using a micro-capill- ary X-ray refractive tens. Using a gold M-phase plate, positive phase contrast images were successfully taken. The microscope System was designed so that the 1D & 2D phase contrast images can be taken with various sizes of the phase plates and the absorption contrast images, switchable by moving the phase plate. The profiles of the observed images are compared with the theoretically expected ones and they qualitatively agreed with each other. The sensitivity of the system was checked by detecting weakly absorbing materials, such as the SiC particles with the diameter of less than 5 micrometer.