J. Phys. IV France
Volume 104, March 2003
Page(s) 587 - 590

J. Phys. IV France
104 (2003) 587
DOI: 10.1051/jp4:20030150

Soft X-ray holographic microscopy with 300 nm resolution

J. Chen, H. Gao, S. Jiang, H. Xie and Z. Xu

Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China

X-ray in-line holograms are recorded in photoresist at Hefei National Synchrotron Radiation Laboratory. An Atomic Force Microscope (AFM) is used to read the X-ray holograms recorded on photoresist PMMA. Digitized hologram is reconstructed by numerical method. The granules with a size less than 300 nm can be resolved in the reconstructed image. So, the estimated resolution reaches the level of 300 nm.

© EDP Sciences 2003