| Numéro |
J. Phys. IV France
Volume 104, March 2003
|
|
|---|---|---|
| Page(s) | 587 - 590 | |
| DOI | https://doi.org/10.1051/jp4:20030150 | |
J. Phys. IV France 104 (2003) 587
DOI: 10.1051/jp4:20030150
Soft X-ray holographic microscopy with 300 nm resolution
J. Chen, H. Gao, S. Jiang, H. Xie and Z. XuShanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
Abstract
X-ray in-line holograms are recorded in photoresist at Hefei National Synchrotron
Radiation Laboratory. An Atomic Force Microscope (AFM) is used to read the X-ray holograms
recorded on photoresist PMMA. Digitized hologram is reconstructed by numerical method. The
granules with a size less than 300 nm can be resolved in the reconstructed image. So, the
estimated resolution reaches the level of 300 nm.
© EDP Sciences 2003