| Numéro |
J. Phys. IV France
Volume 104, March 2003
|
|
|---|---|---|
| Page(s) | 277 - 280 | |
| DOI | https://doi.org/10.1051/jp4:200300080 | |
J. Phys. IV France 104 (2003) 277
DOI: 10.1051/jp4:200300080
Novel microstructured adaptive X-ray optics
A.G. Michette1, P.D. Prewett2, A.K. Powell1, S.J. Pfauntsch1, K.D. Atkinson1 and B. Boonliang11 Department of Physics, King's College London, Strand, London WC2R 2LS, U.K.
2 School of Engineering, The University of Birmingham, Edgbaston, Birmingham B15 2TT, U.K.
Abstract
Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and
make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and
layout, these offer much better performances than current grazing incidence optics, which are limited to circular,
square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal
length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography
and confocal x-ray microscopy.
© EDP Sciences 2003