J. Phys. IV France
Volume 11, Numéro PR11, Décembre 2001International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
|Page(s)||Pr11-71 - Pr11-76|
J. Phys. IV France 11 (2001) Pr11-71-Pr11-76
Dielectric properties of Ti-deficient SrTiO3-δ thin filmsD. Fuchs, M. Adam and R. Schneider
Forschungszentrum Karlsruhe GmbH, Institut für Festkörperphysik, P.O. Box 3640, 76021 Karlsruhe, Germany
Ti-deficient SrTixO3-δ thin films were prepared by high frequency magnetron sputtering. Electric transport and dielectric characterization was carried out by using plate-like capacitors with YBa2Cu3O7-δ as electrode material. Samples with x = 0.988, 0.98 and 0.89 were measured in the frequency and temperature range between 100 Hz and 100 kHz and 4.2 K and 300 K, respectively. The transport properties of the films were dominated by variable range hopping via localized states. With decreasing x the density of localized states increases nearly linearly indicating that the Ti-deficiency is primarily compensated by the formation of point defects. For low defect concentration, x > 0.89, the dielectric constant is enhanced significantly by the defect formation whereas, for x ≤ 0.89, a very strong decrease of the polarization occurs accompanied by a drastic increase of the dielectric loss. tan δ.
© EDP Sciences 2001