J. Phys. IV France
Volume 11, Numéro PR3, Août 2001Thirteenth European Conference on Chemical Vapor Deposition
|Page(s)||Pr3-505 - Pr3-515|
J. Phys. IV France 11 (2001) Pr3-505-Pr3-515
General aspects of surface chemistry of metal β-diketonatesI.K. Igumenov, A.E. Turgambaeva and P.P. Semyannikov
Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Lavrentiev 3, Novosibirsk 630090, Russia
Chemical reactions of metal β-diketonates, which are conventional CVD precursors, on hot surface, have been considered. Extensive experimental data on thermal behaviour of metal β-diketonate vapours obtained by hightemperature mass spectrometry have been generalized. The influence of different gas reagents on thermal stability of the compounds has been discussed. The main mechanisms of the decomposition of compounds under investigation, leading to metal and oxide formation on hot surface, have been established. Application of mass spectrometric data to the optimization of CVD processes (precursor choice, temperature range of deposition) has been shown. A possibility to predict film composition using the data on gaseous decomposition products has been considered.
© EDP Sciences 2001