J. Phys. IV France
Volume 11, Numéro PR2, Juillet 2001
X-Ray Lasers 2000
Page(s) Pr2-389 - Pr2-396
7th International Conference on X-Ray Lasers

J. Phys. IV France 11 (2001) Pr2-389-Pr2-396

DOI: 10.1051/jp4:2001275

Liquid-jet laser-plasma X-ray sources for microscopy and lithography

H.M. Hertz, M. Berglund, B.A.M. Hansson, O. Hemberg and G.J. Johansson

Biomedical and X-Ray Physics, Royal Institute of Technology, 10044 Stockholm, Sweden

We review the development of compact laser-plasma soft x-ray sources based on microscopic liquid-drop or liquid-jet targets. It is shown that such sources provide practically debris-free, high-flux operation at water-window and EUV wavelengths. This regenerative and solid-density target system holds promise for the generation of high-average power using high-repetition-rate lasers. Application of the source to compact x-ray microscopy, multilayer-optics characterization and EUV lithography is briefly discussed.

© EDP Sciences 2001