J. Phys. IV France
Volume 09, Numéro PR8, September 1999Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
|Page(s)||Pr8-785 - Pr8-789|
J. Phys. IV France 09 (1999) Pr8-785-Pr8-789
Kinetics of laser-assisted single crystal growth of tungsten rodsK. Larsson, K. Williams, J. Maxwell and M. Boman
Department of Inorganic Chemistry, Angström Laboratory, Uppsala University, Box 538, 75121 Uppsala, Sweden
The kinetics in laser-assisted CVD of tungsten rods have been investigated as a function of laser power density. WF6 and H2 were used as reaction gas mixture. At low temperatures and low laser powers densities (P<0.45 MW/cm2) polycrystalline and circular shaped rods were grown. At higher temperatures and laser power densities, square shaped and single crystalline rods were formed. The rods grew out from the surface i.e. parallel with the optical axis and always in the <100> direction. They were characterised by scanning electron microscopy, energy dispersed X-ray spectroscopy and single crystal X-ray diffraction.
© EDP Sciences 1999