Plasma chemistry of nonequilibrium microwave discharges. Status and tendency

Abstract
A brief review presents the major types of microwave plasma generators which are used in plasma chemistry and principles of plasma chemical processing. Physico-chemical basic for comparison of chemical activity of nonequilibrium plasmas obtained in different discharges (invariants of comparison, differences and similarities in physical properties of plasmas as a medium for realization of chemical reactions, urgent problems.) is discussed. Several examples are given describing microwave plasma applications in chemistry. Tendencies in the investigations of microwave plasma which seems to help in the progress in understanding of microwave plasma distinctive features chemistry are formulated.