J. Phys. IV France
Volume 08, Numéro PR7, October 19983rd International Workshop Microwave Discharges : Fundamentals and Applications
|Page(s)||Pr7-275 - Pr7-286|
J. Phys. IV France 08 (1998) Pr7-275-Pr7-286
Pulsed discharges produced by strong microwavesA.L. Vikharev
lnstitute of Applied Physics, Russian Academy of Sciences, 46 Ulyanov Street, Nizhny Novgorod 603600, Russia
The paper reviews the main types of pulsed self-sustained discharges produced in gas by strong microwaves. The paper lists base types of microwave generators used to produce pulsed discharges and classifies the discharges relative to their base parameters : the way the discharge gets localized in a limited space, amplitude and frequency of the microwave field, gas pressure and composition, duration of microwave pulses. The paper analyses potentials of pulsed microwave discharges for manufacture of diamond films, ozone generation and pumping of nitrogen and excimer lasers.
© EDP Sciences 1998