Numéro |
J. Phys. IV France
Volume 06, Numéro C8, Décembre 1996
ICIFUAS 11Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids |
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Page(s) | C8-643 - C8-646 | |
DOI | https://doi.org/10.1051/jp4:19968138 |
ICIFUAS 11
Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids
J. Phys. IV France 06 (1996) C8-643-C8-646
DOI: 10.1051/jp4:19968138
1 Institut für Metallphysik und Nukleare Festkörperphysik, Germany
2 Institut für Halbleitertechnik, Technische Universität, 38106 Braunschweig, Germany
© EDP Sciences 1996
Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids
J. Phys. IV France 06 (1996) C8-643-C8-646
DOI: 10.1051/jp4:19968138
Internal Friction of Amorphous Zr65Al7.5Cu27.5-Films
L. Kempen1, U. Harms1, H. Neuhäuser1, D. Scholz2, E. Peiner2 and A. Schlachetzki21 Institut für Metallphysik und Nukleare Festkörperphysik, Germany
2 Institut für Halbleitertechnik, Technische Universität, 38106 Braunschweig, Germany
Abstract
Using a vibrating reed device with micro structurized Si reeds the dynamic mechanical properties Young's modulus and damping of thin films deposited on the reeds are measured simultaneously with the curvature of the specimen. The curvature yields the internal stress of the film. As an example, measurements on amorphous Zr65Al7.5Cu27.5 -films are shown and compared with measurements on amorphous splat cooled specimen of the same composition. A pronounced damping peak in the thin films is observed slightly below room temperature which is attributed to hydrogen relaxation jumps.
© EDP Sciences 1996