J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-637 - C5-645
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-637-C5-645

DOI: 10.1051/jphyscol:1995576

Deposition of Boron Containing Coatings Using MO-PACVD Process to Protect Aluminium Casting Tools

K.-T. Rie1, A. Gebauer2 and C. Pfohl1

1  Institut für Oberflächentechnik und Plasmatechnische Werkstoffentwicklung, TU Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany
2  Fraunhofer-Institut für Schicht- und Obeflächentechnik, Bienroder Weg 54E, 38108 Braunschweig, Germany

In this paper the synthesis of (B,C,N), Zr(B,C) and Zr(B,C,N) layers is investigated by means of DC pulsed plasma assisted CVD using organic compounds as precursors. The process parameters such as coating temperature, gas pressure, gas mixture, plasma parameters are varied to deposit functional coatings on hot-work steel used in the aluminium die casting industry. One of the objectives is to realize a layer type which withstands the severe service conditions in aluminium die casting. Another objective is to lower the coating temperature. The layers have been studied by light- and scanning electron microscopy (SEM). The properties of the deposited layers are determined by various analytical methods such as WDS-analysis for the chemical composition and X-ray diffraction (XRD) for the morphology. The hardness and adhesion of the layers were measured to determine the mechanical properties. The adhesion to liquid aluminium is investigated and compared to TiN layers deposited with TiC14 as precursor.

© EDP Sciences 1995