J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-423 - C5-430
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-423-C5-430

DOI: 10.1051/jphyscol:1995549

Growth of (YBaCuO)m/(PrBaCuO)n Superlattices by MOCVD

N. Didier1, B. Chenevier1, O. Thomas2, J.P. Sénateur1, F. Weiss1 and A. Gaskov3

1  Laboratoire des Matériaux et du Génie Physique, URA 1109 du CNRS, ENSPG, BP. 46, 38402 Saint Martin d'Hères, France
2  Laboratoire MATOP, Case 151, Université Aix-Marseille III, 13397 Marseille cedex 20, France
3  Université Lomonossov, 119899 Moscow, Russia

[(YBaCuO)m / (PrBaCuO)n]10 multilayers have been deposited by Metal Organic Chemical Vapor Deposition (MOCVD). The films grow on SrTiO3 (100) and MgO (100) substrates and have c-axis perpendicular to the substrate. A serie of superlattices has been synthesised with different deposition temperatures ranging between 700 and 850°C with different modulations (the thickness of YBCO layers staying unchanged and equal to 100Å). The elements concentrations profiles at the interfaces and the interdiffusion were determined by secondary neutral mass spectroscopy (SNMS). X-ray diffraction show satellite peaks (characteristic of superlattice modulation) around 001 and 002 reflections. Moreover, the samples show a good in-plane orientation. The superconducting properties are analysed by AC screening. The critical temperature reaches 88K in the case of m=8 and n=2 (n and m being the numbers of units cells along c-axis for YBCO layer and PBCO one respectively).

© EDP Sciences 1995