Numéro
J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-357 - C5-364
DOI https://doi.org/10.1051/jphyscol:1995542
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-357-C5-364

DOI: 10.1051/jphyscol:1995542

A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature Superconductors

A.Y. Kovalgin1, F. Chabert-Rocabois2, M.L. Hitchman2, S.H. Shamlian2 and S.E. Alexandrov1

1  Department of Electronic Material Technology, St Petersburg State Technical University, Polytechnical Street 29, St Petersburg 195 251, Russia
2  Department of Pure and Applied Chemistry, University of Strathclyde, 295 Cathedral Street, Glasgow G1 1XL, U.K.


Abstract
In this paper we report on a study by FTIR spectroscopy of the gas phase thermal decomposition of [Y(TMHD)3], [Cu(TMHD)2] and [Ba(TDFND)2,tetraglyme] under a total pressure of 10 Torr, for a temperature range 200 - 650°C, and in the absence and presence of oxygen. The variation of the decomposition characteristics for each of the complexes as a function of temperature, and as shown by changes in the absorption coefficients, are related to the molecular structures.



© EDP Sciences 1995