J. Phys. IV France
Volume 05, Numéro C5, Juin 1995Proceedings of the Tenth European Conference on Chemical Vapour Deposition
|Page(s)||C5-357 - C5-364|
J. Phys. IV France 05 (1995) C5-357-C5-364
A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature SuperconductorsA.Y. Kovalgin1, F. Chabert-Rocabois2, M.L. Hitchman2, S.H. Shamlian2 and S.E. Alexandrov1
1 Department of Electronic Material Technology, St Petersburg State Technical University, Polytechnical Street 29, St Petersburg 195 251, Russia
2 Department of Pure and Applied Chemistry, University of Strathclyde, 295 Cathedral Street, Glasgow G1 1XL, U.K.
In this paper we report on a study by FTIR spectroscopy of the gas phase thermal decomposition of [Y(TMHD)3], [Cu(TMHD)2] and [Ba(TDFND)2,tetraglyme] under a total pressure of 10 Torr, for a temperature range 200 - 650°C, and in the absence and presence of oxygen. The variation of the decomposition characteristics for each of the complexes as a function of temperature, and as shown by changes in the absorption coefficients, are related to the molecular structures.
© EDP Sciences 1995