J. Phys. IV France
Volume 05, Numéro C5, Juin 1995Proceedings of the Tenth European Conference on Chemical Vapour Deposition
|Page(s)||C5-205 - C5-211|
J. Phys. IV France 05 (1995) C5-205-C5-211
Mechanism of Thermal Decomposition of Palladium β-Diketonates Vapour on Hot surfaceP.P. Semyannikov, V.M. Grankin, I.K. Igumenov and A.F. Bykov
Institute of Inorganic Chemistry, Lavrentieva, 3, Novosibirsk, 630090, Russia
The processes of thermal decomposition of palladium(II) β-diketonate complexes were investigated by a high-temperature mass spectrometric method with the use of a high-temperature molecular beam source. It was established that decomposition of the palladium complexes in gas phase processes proceeds by a radical mechanism and depends on temperature. For an additional proof of the existence of the radical particles the spin trap method was applied with a mass spectrometric identification of adducts. The following order of thermal stability of the complexes in gas phase was established : [MATH]. This order is reverse to the thermal stability in a solid state. The thermal decomposition of Pd(aa)2 and Pd(hfa)2 complexes in deuterium showed that the deuterium presence strongly accelerates the decomposition processes.
© EDP Sciences 1995