J. Phys. IV France
Volume 05, Numéro C5, Juin 1995Proceedings of the Tenth European Conference on Chemical Vapour Deposition
|Page(s)||C5-71 - C5-77|
J. Phys. IV France 05 (1995) C5-71-C5-77
Kinetic Modeling of the Gas Phase Decomposition of Germane by Computational Chemistry TechniquesM. Hierlemann1, H. Simka2, K.F. Jensen2 and M. Utz3
1 Corporate R&D, Siemens AG, München, Germany
2 Dep. Chem. Eng., Massachusetts Institute of Technology, U.S.A.
3 Institut für Polymere ,ETH Zürich, Switzerland
Very limited experimental data are available on thermal decomposition of germane in the gas phase. Recent developments in the theoretical quantum chemistry techniques such as ab initio Hartree-Fock and density functional methods have made accurate determination of molecular properties possible. Systematic development of a delaited gas-phase decomposition mechanism for germane using ab initio molecular orbital calculations is described in this work. A decomposition pathway for germane and higher germanes is proposed and the relevant reaction rates are calculated using transition state theory combined with unimolecular and chemical activation treatments. The decomposition model is implemented into a realistic thermal-fluid simulation.
© EDP Sciences 1995