Interferences of Peltier thermal waves produced in ohmic contacts upon integrated circuits

Abstract
We have experimentally detected a Peltier effect produced by the current flow in ohmic contacts upon integrated circuits. These contacts are small size heat sources which are very useful for investigating integrated circuits. We have characterised their thermal properties with a high resolution interferometric laser probe by measuring absolute thermal expansions. Subpicometric resolution has allowed original imaging of semiconductor components : we have mapped the thermal waves created at ohmic contacts under normal operating conditions.