| Numéro |
J. Phys. IV France
Volume 01, Numéro C7, Décembre 1991
2nd International ConferenceLaser M2P |
|
|---|---|---|
| Page(s) | C7-671 - C7-671 | |
| DOI | https://doi.org/10.1051/jp4:19917179 | |
2nd International Conference
Laser M2P
J. Phys. IV France 01 (1991) C7-671-C7-671
DOI: 10.1051/jp4:19917179
Scientific Research Centre for Technological Lasers, Ac. Sci. USSR, Moscow Region Pionerskaya 2, Troitsk 142092, USSR
© EDP Sciences 1991
Laser M2P
J. Phys. IV France 01 (1991) C7-671-C7-671
DOI: 10.1051/jp4:19917179
EXCIMER-LASER-INDUCED CHEMICAL VAPOR DEPOSITION OF COPPER FILMS FROM COPPER TRIFLUOROACETYLACETONATE
E.N. ANTONOV, V.N. BAGRATASHVILI, O.V. FATEEV and V.A. SEMCHISHENScientific Research Centre for Technological Lasers, Ac. Sci. USSR, Moscow Region Pionerskaya 2, Troitsk 142092, USSR
Without abstract
© EDP Sciences 1991
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