Journal de Physique IV

Powder Dissipation in PECVD for SiH₄-CH₄-H₂ Gas Mixtures

P. Rava, G. Crovini, F. Demichelis, F. Giorgis, R. Galloni, R. Rizzoli and C. Summonte

J. Phys. IV France, 05 C5 (1995) C5-1125-C5-1132

DOI: 10.1051/jphyscol:19955133

P. Rava

G. Crovini

F. Demichelis

F. Giorgis

R. Galloni

R. Rizzoli

C. Summonte

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)