Journal de Physique IV

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Développement d'une source EUV plasma laser pour la micro-lithographie

M. Segers, M. Bougeard, E. Caprin, T. Ceccotti, F. Chichmanian, D. Descamps, P. Haltebourg, J.-F. Hergott, S. Hulin, D. Normand et al. (2 more)

J. Phys. IV France, 108 (2003) 267-270

DOI: 10.1051/jp4:20030641

M. Segers

M. Bougeard

E. Caprin

T. Ceccotti

F. Chichmanian

D. Descamps

P. Haltebourg

J.-F. Hergott

S. Hulin

D. Normand

M. Schmidt

O. Sublemontier

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