Journal de Physique IV

Properties of thin AIN films prepared by PECVD and rapid thermal processes

G.D. Beshkov, S.S. Georgiev, K.G. Grigorov, H.S. Maciel, A. Djouadi and M. Marinov

J. Phys. IV France, 11 PR3 (2001) Pr3-287-Pr3-292

DOI: 10.1051/jp4:2001336

G.D. Beshkov

S.S. Georgiev

K.G. Grigorov

H.S. Maciel

A. Djouadi

M. Marinov

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