Journal de Physique IV

Second harmonic modulated photo-reflectance imaging of integrated circuits

Z.-L. Qian, S.-Y . Zhang, Y.-S. Lu, J. He and M. Tao

J. Phys. IV France, 04 C7 (1994) C7-203-C7-206

DOI: 10.1051/jp4:1994749

Z.-L. Qian

S.-Y . Zhang

Y.-S. Lu

J. He

M. Tao

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