Journal de Physique IV

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Analyse de couches ou multicouches par SIMS : interprétation du profil aux interfaces

M. AUCOUTURIER, Ch. GRATTEPAIN, A. TROMSON-CARLI, M. BARBÉ, G. COHEN-SOLAL, Y. MARFAING, F. CHEVRIER, H. LE GALL and D. IMHOFF

J. Phys. IV France, 03 C7 (1993) C7-803-C7-806

DOI: 10.1051/jp4:19937127

M. AUCOUTURIER

Ch. GRATTEPAIN

A. TROMSON-CARLI

M. BARBÉ

G. COHEN-SOLAL

Y. MARFAING

F. CHEVRIER

H. LE GALL

D. IMHOFF

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