Journal de Physique IV

INVESTIGATION OF ELECTRICAL PROPERTY INHOMOGENEITIES FORMED BY PLASMA ETCHING

I.E. BONDARENKO, S.V. KOVESHNIKOV, E.B. YAKIMOV and N.A. YARYKIN

J. Phys. IV France, 01 C6 (1991) C6-217-C6-222

DOI: 10.1051/jp4:1991633

I.E. BONDARENKO

S.V. KOVESHNIKOV

E.B. YAKIMOV

N.A. YARYKIN

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