Journal de Physique IV

PLANARIZED LOW-STRESS OXIDE/NITRIDE PASSIVATION FOR ULSI DEVICES

H. TREICHEL, R. BRAUN, Z. GABRIC, O. SPINDLER and A. GSCHWANDTNER

J. Phys. IV France, 02 C2 (1991) C2-839-C2-846

DOI: 10.1051/jp4:1991299

H. TREICHEL

R. BRAUN

Z. GABRIC

O. SPINDLER

A. GSCHWANDTNER

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