Journal de Physique IV

DEPOSITION OF BORON NITRIDE BY PLASMA ENHANCED CVD USING BORANE AMINE

J.G.M. BECHT, A. BATH, E. HENGST, P.J. VAN DER PUT and J. SCHOONMAN

J. Phys. IV France, 02 C2 (1991) C2-617-C2-624

DOI: 10.1051/jp4:1991274

J.G.M. BECHT

A. BATH

E. HENGST

P.J. VAN DER PUT

J. SCHOONMAN

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)