Journal de Physique IV

THE INFLUENCE OF WATER VAPOR ON THE SELECTIVE LOW PRESSURE CVD OF COPPER

B. LECOHIER, J.-M. PHILIPPOZ, B. CALPINI, T. STUMM and H. VAN DEN BERGH

J. Phys. IV France, 02 C2 (1991) C2-279-C2-286

DOI: 10.1051/jp4:1991234

B. LECOHIER

J.-M. PHILIPPOZ

B. CALPINI

T. STUMM

H. VAN DEN BERGH

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