Transmission Electron Microscopy Studies of (AIN-Si3N4) Codeposits Obtained by LPCVD P. Marti, F. Henry, A. Mazel, B. Armas and J. SevelyJ. Phys. IV France, 05 C5 (1995) C5-905-C5-912DOI: https://doi.org/10.1051/jphyscol:19955107
