Study of the growth mechanism of CVD silicon films on silica by X-ray reflectivity, atomic force microscopy and scanning electron microscopy A. van der Lee, J. Durand, D. Cot and L. VázquezJ. Phys. IV France, 09 PR8 (1999) Pr8-157-Pr8-164DOI: https://doi.org/10.1051/jp4:1999819
